Book Description
“Silicon remains the dominant semiconductor and MOS transistors are still the most common active devices. Their gate lengths have steadily shrunk and the number of transistors per die has grown into the tens and hundreds of thousands. The more advanced mixed-signal processes now use damascene copper interconnect. Excimer laser-based scanners have largely replaced I-line steppers. New fabs utilize 12-inch (300 mm) wafers. Shallow trench isolation has largely supplanted LOCOS. A multitude of higher-power and higher-density packaging technologies have appeared. Optical proximity correction has grown more complex and DRC rulesets now contain thousands of rules”–
Book Details
- Author: Ray Alan Hastings
- Publisher: Pearson
- Published Date: 2023-03
- Published Year: 2023
- Language: English
- ISBN-13: 9780138038397


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